@article{235,
  author = {N. Materer and R. Goodman and Stephen Leone},
  title = {Ion-Enhanced Etching of Si(100) with Molecular Chlorine:~ Neutral and Ionic Product Yields as a Function of Ion Kinetic Energy and Molecular Chlorine Flux},
  year = {2000},
  journal = {The Journal of Physical Chemistry B},
  volume = {104},
  pages = {3261-3266},
  month = {Jan-04-2000},
  issn = {1520-6106},
  doi = {10.1021/jp993278q},
}