@article{2297,
  author = {D. Wilson and Cindy Regal and S. Papp and H. Kimble},
  title = {Cavity Optomechanics with Stoichiometric SiN Films},
  year = {2009},
  journal = {Physical Review Letters},
  volume = {103},
  pages = {207204},
  month = {2009-09},
  issn = {0031-9007},
  doi = {10.1103/PhysRevLett.103.207204},
}