@article{1667,
  author = {W. Zheng and Alan Gallagher},
  title = {Hot wire radicals and reactions},
  year = {2006},
  journal = {Thin Solid Films},
  volume = {501},
  pages = {21-25},
  month = {Jan-04-2006},
  issn = {00406090},
  doi = {10.1016/j.tsf.2005.07.116},
}