@article{1027,
  author = {Alan Gallagher and G. Bano and K. Rozsa},
  title = {Particles in silicon deposition discharges},
  year = {2003},
  journal = {Solar Energy Materials and Solar Cells},
  volume = {78},
  pages = {27-40},
  month = {Jan-07-2003},
  issn = {09270248},
  doi = {10.1016/S0927-0248(02)00432-4},
}