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Probing limits of acoustic nanometrology using coherent extreme ultraviolet light

Authors: 

Damiano Nardi, Kathleen M. Hoogeboom-Pot, Jorge N. Hernandez-Charpak, Marie Tripp, Sean W. King, Erik H. Anderson, Margaret M. Murnane, Henry C. Kapteyn

Journal, Book, Publication: 
Proc. SPIE, Metrology, Inspection, and Process Control for Microlithography XXVII
Volume: 
8681
Pagination: 
86810N
Year of Publication: 
2013
Month of Publication: 
04
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