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High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography

Authors: 

Bosheng Zhang, Dennis F. Gardner, Matthew D. Seaberg, Elisabeth R. Shanblatt, Henry C. Kapteyn, Margaret M. Murnane, & Daniel E. Adams

Journal, Book, Publication: 
Ultramicroscopy
Volume: 
158
Pagination: 
98-104
Year of Publication: 
2015
Month of Publication: 
11