@article{12310,
  keywords = {Atomic and Molecular Physics, and Optics},
  author = {Bin Wang and Michael Tanksalvala and Zhe Zhang and Yuka Esashi and Nicholas Jenkins and Margaret Murnane and Henry Kapteyn and Chen-Ting Liao},
  title = {Coherent Fourier scatterometry using orbital angular momentum beams for defect detection},
  year = {2021},
  journal = {Optics Express},
  volume = {29},
  chapter = {3342-3358},
  pages = {3342},
  month = {2021-01},
  publisher = {The Optical Society},
  issn = {1094-4087},
  url = {https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-29-3-3342&id=446755},
  doi = {10.1364/oe.414584},
}